Telic provides spin coating services for photoresists and specialty process materials used in microfabrication, lithography, MEMS, microfluidics, photonics, and advanced research applications.
Our spin coating platforms support both development and production requirements, with the capability to process substrates ranging from small-format wafers to large-format panels up to 54″ × 54″. By combining spin coating with substrate preparation, thin film deposition, lithography, inspection, and packaging, Telic offers a streamlined workflow for complex microfabrication programs.
Coating Materials
Telic supports a wide range of commonly used lithography materials, including:
- Photoresists
- Positive Photoresists
- Negative Photoresists
- Process Materials
- Bottom Anti-Reflective Coatings (BARC)
- Top Anti-Reflective Coatings (TARC)
- Anti-Reflective Coatings (AR)
- Lift-Off Resists (LOR)
Additional materials may be available based on application requirements.
Large Format Processing
Telic supports coating of both conventional and large-format substrates.
- Substrates up to 54″ × 54″
- Small-Format Wafers & Substrates
- Custom Substrate Geometries upon Review
This capability supports applications that exceed the size limitations of many conventional microfabrication facilities.
Thick Film Capability
Coating Thicknesses up to 50 µm
This supports applications requiring thicker resist structures, microfabrication features, and specialized process development.
Process Control
- High Uniformity Coating Processes
- 0.04 µm Filtration
- Controlled Material Handling
These controls support repeatable coating performance and substrate cleanliness throughout processing.
Spin coating is fully integrated within Telic’s manufacturing workflow:
Double-Sided Polishing PVD Thin Film Coatings Spin Coating Lithography & Lift-Off Quality Inspection Custom Cleanroom Packaging
Maintaining critical process steps within a single facility reduces handling, contamination risk, and production complexity.
Spin Coating Applications
- Photomask Blanks
- Reticles
- Lithography Development
- Lift-Off Processing
- MEMS Fabrication
- Microfluidic Devices
- Photonic Structures
- Research & Development Programs
- Integrated Manufacturing
Let’s Discuss Your Project
Whether you’re developing a prototype, scaling production, or looking for a manufacturing partner for a specialized microfabrication challenge, our team is ready to help.
